Vacuum pump and its type

A container is placed in a natural environment. If the internal gas pressure is not changed, the internal and external gas pressure of the container will reach a state of equilibrium, which is numerically equal to atmospheric pressure. In order to make the inside of the container reach the vacuum state, it is necessary to discharge the gas inside the container so that the internal gas pressure is less than the external atmospheric pressure. A vacuum pump is a kind of equipment that uses mechanical, physical, chemical or physicochemical methods to discharge gas from the container to obtain vacuum.

According to its working principle, vacuum pump can be divided into two types: compression type (variable volume type) and adsorption type. The working principle of compression vacuum pump is to compress the gas at the inlet end of the pump to the outlet end and discharge it to the outside of the pump. Common compression vacuum pumps are: rotary mechanical pump using expansion compression discharge process, turbine molecular pump using turbine blades to exhaust gas, etc. The working principle of adsorption vacuum pump is to adsorb gas in the pump body, which has achieved the purpose of reducing gas pressure.

Common adsorption vacuum pumps include: ion pump with ionization suction, adsorption pump with physical or chemical adsorption, suction pump and low-temperature condensate pump, etc. The biggest difference between the adsorption vacuum pump and the compression vacuum pump is that the adsorption vacuum pump does not discharge the gas out of the pump, but store it in the pump. The former can achieve higher vacuum degree than the latter, but the pumping speed is small, and the applicable container is also small. The vacuum resistance furnace adopts compression vacuum pump, such as mechanical pump, roots pump and diffusion pump.

All kinds of vacuum pumps have their own working range. Some pumps can work directly from the atmospheric state, such as mechanical pumps and adsorption pumps. Some pumps cannot work directly from the atmospheric state, such as diffusion pumps, molecular pumps, ion pumps, etc. only when the inlet vacuum reaches a certain value can they start to work.

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