Classification of dry vacuum pumps

In the past, oil vacuum pumps were widely used in various semiconductor processes and vacuum pumps and piston vacuum pumps are important representatives. And they don't make people proud of their applications. Therefore, the dry vacuum pump came into being. Over the past year, there have been several different examples of dry vacuum pump planning and production, and they have significant differences in machine layout planning. Because of this difference, we can classify the dry vacuum pump into the following types: round blade type, claw type, combined type (root claw), screw type.

Today, these examples are widely used by different manufacturers. Round, claw and combination (root claw) are called multistage pumps. Because of their similar methods, vacuum is repeatedly compressed by multi-stage vacuum chamber to produce vacuum. In the process of repeated compression, the temperature and pressure of gas will also change greatly, so it is easier to change the physical properties of gas. Screw pump is called single-stage pump because it can only produce vacuum by vacuum cavity. According to the different gas compression method, it can be divided into internal pressure screw pump and external pressure screw pump. Here are some physical examples of these differential pumps that are expected to be funded.
The two peak scheme is that roots pump is the most popular and widely used very similar. In fact, the first dry pump plan was to pump roots together. This multi-stage scheme makes the gas path very large, and each stage needs a large nitrogen flow to dilute and cut off. At the same time, in order to get a good vacuum, all levels of customs clearance requirements are very strict. Of course, this program makes the power consumption relatively low due to the increase of internal compression ratio.

The principle of one three leaf circular scheme is exactly the same, two leaf segmentation scheme. It divides the gas into three parts, not a circular disc. It's two copies. There are similar advantages and disadvantages between three lobed ring programming and bicircle splitting scheme. In order to further reduce the power consumption, some manufacturers choose two DC motors in the transmission department, but this will also lead to the reduction of torque and the ability to restart. In the same way, the scheme of every three lobes needs a large flow of nitrogen dilution effect.

The progress of the combined (root and claw) program is that the claws with lower pressure are subject to pumping under the leadership of rocalay and the progress of pumps under higher pressure. The basic principle of the front gas path of the same type of program blade. Some manufacturers have changed their final phase to a star like program, such as allowing gas to be divided into five parts in a spinning cycle, such as the three-wheel program, which can be divided into three parts. Similarly, in many processes, each phase of a joint program requires a large flow of nitrogen to dilute and shut off.
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