Design of vacuum unit
What are the design conditions and steps of vacuum
unit
(1) Design conditions of vacuum unit
① Known parameters of
vacuum chamber: volume of vacuum chamber; surface area of outgassing; air
leakage of vacuum chamber; working vacuum degree; limit vacuum degree; pre
pumping time and pumping time to reach the limit vacuum.
② Gas sources
in the vacuum chamber: atmosphere in the vacuum chamber; air release from the
surface of the vacuum chamber; air leakage from the dynamic and static seals of
the vacuum chamber; gas permeation from the shell; gas released from the
processed materials; gas introduced for the process.
③ Special
requirements for vacuum chamber: whether dust, metal splashing, corrosive gas,
water vapor, etc. are generated in the process; whether oil-free and vibration
free are required in the vacuum chamber.
(2) General program of design
and calculation of vacuum unit
A. The calculation of the total
outgassing volume in the vacuum chamber;
B. Determine the effective
pumping speed of the vacuum chamber;
C. Primary main pump and primary
vacuum pump;
D. Select valves, traps, dust collectors and other vacuum
components according to requirements;
E. Draw the assembly sketch of
vacuum system and determine the size of each part;
F. Confirm (recheck)
the parameters of each vacuum pump. If the crude vacuum pump fails to meet the
requirements, it is necessary to reselect and distribute the pump until the
parameters meet the requirements;
G. Draw the assembly drawing of vacuum
system;
H. Draw part drawing and construction drawing.
These
eight design calculation steps are indispensable for non-standard design. With
the continuous development of vacuum equipment, with the continuous emergence of
various new types of vacuum units, the design process of vacuum system will
continue to simplify. Now there are set vacuum units, if you can directly select
set vacuum units to obtain the required vacuum system, you can save the trouble
of real air system design.
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