Vacuum system is actually a similar name of vacuum unit. Vacuum unit is a set of closed-loop vacuum equipment composed of several vacuum pumps. It does not necessarily have some equipment such as radiator, condenser and so on. And what can be called vacuum system generally is that all kinds of parts are complete.
The pressure parameter can be seen everywhere in the vacuum system, which refers to the vertical force of gas on the solid or liquid surface, and it is synonymous with the pressure in the vacuum system.
The common pressure parameter is the limit pressure: the limit pressure is one of the main parameters of the vacuum pump performance in the vacuum system. It is generally understood that in the process of vacuum system pumping, after a long time of pumping, when the pumping speed of vacuum pump or vacuum unit is 0 or the pressure parameter of vacuum chamber is maintained at a certain value all the time, that is the limit pressure of vacuum pump or vacuum unit.
Second is the basic pressure: in some process areas or technical personnel's mouth, the basic pressure is also called the background pressure, which refers to the pressure of the vacuum chamber when the production process is implemented. For example, for magnetron sputtering applications, it may be necessary to pump the local pressure to 10-4Pa, while the working pressure during sputtering may be about 1pA.
Working pressure: working pressure is the pressure parameter necessary for the process implementation and product quality in the production process of the enterprise. In the process of vacuum equipment selection, in order to meet the process requirements, the limit pressure of the equipment will be lower than the working pressure by an order of magnitude.
Residual pressure: sometimes, the residual pressure is the same as the ultimate pressure, which refers to the total pressure of the residual gas in the vacuum chamber after a period of pumping operation of the vacuum pump or vacuum unit. If the vacuum system has no pumping speed at this time, the residual pressure is the limit pressure of vacuum pump or vacuum unit.
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