2019年12月11日星期三

Application scope of dry vacuum pump

Application scope of dry vacuum pump

Now, the dry vacuum pump is more and more popular, and its application range is more and more wide. What are the specific application fields? Here is an introduction.

1. In the process of polysilicon preparation in low-pressure chemical vapor deposition;

2. Semiconductor etching process. In these production processes, corrosive gas and abrasive particles are often used or generated;


3. Except for the semiconductor process, some processes that produce particles do not want particles to be mixed into the pump oil. Besides the particle discharge pump, a certain type of dry vacuum pump can meet the requirements;

4. Distillation, drying, defoaming and packaging in chemical industry, pharmaceutical industry and food industry;

5. It is used as the front pump of general oil-free cleaning vacuum system to prevent oil pollution.

The appearance of dry vacuum pump adds a new "beautiful scenery" to the vacuum industry, which is widely used in various industries due to its good performance.

VACUUM FURNACE

industrial vacuum pumps,vacuum furnaces

Heat treatment equipment

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