Application scope of dry vacuum pump
Now, the dry vacuum pump is more
and more popular, and its application range is more and more wide. What are the
specific application fields? Here is an introduction.
1. In the process
of polysilicon preparation in low-pressure chemical vapor deposition;
2.
Semiconductor etching process. In these production processes, corrosive gas and
abrasive particles are often used or generated;
3. Except for the
semiconductor process, some processes that produce particles do not want
particles to be mixed into the pump oil. Besides the particle discharge pump, a
certain type of dry vacuum pump can meet the requirements;
4.
Distillation, drying, defoaming and packaging in chemical industry,
pharmaceutical industry and food industry;
5. It is used as the front
pump of general oil-free cleaning vacuum system to prevent oil pollution.
The appearance of dry vacuum pump adds a new "beautiful scenery" to the
vacuum industry, which is widely used in various industries due to its good
performance.
VACUUM
FURNACE
industrial vacuum pumps,vacuum furnaces
Heat treatment equipment
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