Sealing reliability and installation requirements of vacuum pump

Under its working pressure, the vacuum pump should be able to discharge all the gas produced in the process of vacuum equipment. Combine the vacuum pump correctly. Due to the selective pumping of vacuum pump, sometimes one kind of pump can not meet the requirement of air extraction. It needs several pumps to combine and supplement each other to meet the requirement of air extraction. If the titanium sublimation pump has a high pumping speed for hydrogen, but can not pump helium, and the tripolar sputtering ion pump (or bipolar asymmetric cathode sputtering ion pump) has a certain pumping speed for argon, the combination of the two will make the vacuum device get better vacuum degree. 

Vacuum pump can not work under atmospheric pressure, need pre vacuum, some vacuum pump outlet pressure is lower than atmospheric pressure, need the front stage pump, so all need to combine the pump. Requirements of vacuum equipment for oil pollution. If the equipment is strictly required to be oil-free, all kinds of oil-free pumps should be selected, such as: water ring pump, molecular sieve adsorption pump, sputtering ion pump, low-temperature pump, etc. If the requirements are not strict, you can choose to have an oil pump, plus some anti oil pollution measures, such as adding cold trap, baffle, oil trap, etc., can also meet the requirements of clean vacuum.

The vacuum pump should be installed in a solid place with sufficient space around for inspection, maintenance and maintenance. The foundation level should be kept under the base of vacuum pump. It is suggested to pad damping rubber or install with bolts at four corners of the base to ensure smooth operation and small vibration of vacuum pump.

The connecting pipe between vacuum pump and system shall be sealed reliably. Metal pipeline connection can be used for small vacuum pump, oil resistant rubber shall be used for sealing gasket, and vacuum rubber pipe can be used for small vacuum pump connection. The pipe diameter shall not be less than the suction diameter of vacuum pump, and the pipeline shall be short with few elbows. (the welding slag in the pipe should be removed when welding the pipeline, and it is forbidden to enter the vacuum pump cavity.)


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