Oil diffusion pump vacuum system pollution and Prevention

The vacuum system of oil diffusion pump is the most commonly used vacuum system, and the vacuum degree range is 1.3 × 10-3 ~ 1.3 × 10-5 PA. All kinds of vacuum formed by vacuum system of oil diffusion pump

After long-term operation, the common defect of the device is that the vacuum degree cannot be pumped up or the vacuum degree cannot reach the original limit vacuum level. Oil vapor pollution and vacuum technology 

The pollution of various pollutants in the process is related to

(1) Clean the vacuum chamber regularly;

(2) Stop cleaning oil seal mechanical vacuum pump and oil metal diffusion pump regularly

Water Ring Vacuum Pump

Dry Scroll Vacuum Pump

industrial vacuum pumps,vacuum furnaces