Scroll vacuum pump

The research of vortex vacuum pump began in the late 1980s. A vertical self rotating oil lubricated scroll water ring vacuum pump with pumping speed of 200L / min was developed. Compared with revolution type vortex vacuum pump, the radial clearance of the pump has the advantages of easy sealing and control. Compared with the vane pump, the scroll pump has higher volumetric efficiency, and the vibration and noise levels in the pump are reduced. In addition, due to its more compact structure, the weight and volume of the machine are reduced by 12% and 40% respectively. The research shows the high efficiency of the scroll vacuum pump, and puts forward the effective methods of how to eliminate the clearance volume and control the clearance. With the continuous expansion of the application of vortex vacuum pump in semiconductor industry, people began to devote themselves to the research of dry scroll vacuum pump. The difference between dry scroll vacuum pump and oil lubricated scroll vacuum pump is that there is no oil and liquid in the pump cavity. Therefore, to solve the problem of sealing and cooling in the pump is the key to the research of dry scroll vacuum pump. 

The ultimate pressure that the pump can reach is 5 × 10 - 3T. It uses water cooling method to solve the lubrication and cooling problems of various parts in the pump. The research shows the feasibility of the dry scroll vacuum pump, and effectively solves the problems such as the contact caused by the thermal deformation of the moving disk and the vibration caused by the centrifugal force. Although the cooling problem of dry scroll vacuum pump can be effectively solved by using water cooling method, the structure of the cooling water circuit is more complicated. Two cooling fans are installed on the main shaft, which are respectively located at the ends of the two stationary disks. When the main shaft rotates, the fans rotate together to achieve the cooling effect on the vortex disk. At the same time, it adopts a semi closed structure to solve the cooling problem of the motor. The pump adopts a totally enclosed structure, the vortex disk is a single vortex ring structure, and the cooling fan is installed at the end of the static disk.


Water Ring Vacuum Pump

Dry Scroll Vacuum Pump

industrial vacuum pumps,vacuum furnaces