Unlike other gas transfer pumps, cryogenic pumps will be saturated in the process of gas capture, so it is necessary to release the adsorbed trapped gas to recover the trapping capacity, which is called regeneration process.
The regeneration of cryogenic vacuum pump includes partial regeneration (only releasing the gas adsorbed by the secondary cold plate) and total regeneration (releasing all the gas adsorbed by the cold plate). This paper is to understand the low temperature pump regeneration of several ways.
In the regeneration process of cryogenic vacuum pump, the released gas needs to be removed in time to prevent possible damage to the pump body or the glass tube shell of vacuum gauge, or even explosion. Because when the temperature rises to a certain temperature, the desorption speed of the permanent gas is very fast, and the pressure in the pump body can be increased to more than one atmospheric pressure in a few minutes.
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