Different vacuum systems require
different degrees of vacuum. Therefore, it is often necessary to complete by a
set of vacuum units, that is, the vacuum pumps working in different pressure
ranges are connected in series.
The vacuum pump with high vacuum
discharge can meet the requirements of vacuum pump on one side. Obviously, the
simplest vacuum unit is a vacuum pump with direct discharge to the atmosphere.
However, the high vacuum system generally needs three-stage units, and the
medium vacuum system generally needs two-stage units.
It is difficult
for a high vacuum pump and a low vacuum pump to form an effective high vacuum
unit. There are several reasons for this. The continuity of traffic is one of
them. High vacuum pump has the limitation of pressure resistance of the front
stage, that is, if the former stage is higher than a certain pressure, the pump
can not work normally. When the current stage pump reaches this critical
pressure, the pumping speed will be reduced, so the exhaust flow of the front
stage pump may be less than that of the main pump. The inconsistency of the flow
rate destroys the requirement of flow continuity, which will inevitably cause
the vacuum unit not to work normally. However, if a medium vacuum pump is
connected between the high and low vacuum pumps, it can serve as a connecting
link between the preceding and the following. The flow rate is continuous, and
all pumps can work in the best state. Roots pump can work in the medium vacuum
range, is the most suitable, so it is also known as roots booster pump, because
its compression ratio is not high, just can connect a few PA to hundreds of PA
range. When the three-stage high vacuum unit enters a higher vacuum degree, due
to the obvious reduction of the exhaust flow of the main pump, the continuity of
air extraction can be maintained only by a small front stage pump. In practical
application, this method is often used, which can reduce the energy consumption
of the unit.
Another reason why high vacuum units often need three-stage
units is due to the limitation of suction pressure of high vacuum pump. All
pumps have initial working pressure, and traditional high vacuum pumps are in
the range of several PA. Therefore, the front stage pump must be pre pumped to
this pressure before the main pump can start to work. However, it usually takes
a long time for the front-stage pump to pump to this pressure, because the
pumping speed of the pump decreases with the decrease of the pressure.
Especially for the vacuum unit with periodic air pumping, the time required for
reaching the working vacuum degree is required. The longer the pre pumping time
is, the longer the time for entering the working vacuum degree is. Therefore, a
medium vacuum pump is added to cooperate with the front stage low vacuum pump to
realize the working vacuum degree It takes a short time to reach the working
pressure of the main pump, so that the system can enter into the working
pressure as soon as possible, thus ensuring the use efficiency of the equipment.
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