Turbomolecular pump is a kind of high vacuum acquisition equipment, which is used to provide a clean high vacuum environment. It has been widely used in electronic industry, optical engineering, surface science and other fields. Small turbomolecular pumps, with their advantages of small size, light weight and low power consumption, are often used in equipment or instruments that require vacuum without emphasis on pumping speed, such as vacuum acquisition equipment as mass spectrometer and leak detector.
Turbine molecular pump takes impeller group as its pumping actuator. The impeller group consists of alternately arranged dynamic and static impellers. When the impeller rotates at high speed, its speed is close to the molecular thermal speed, while the static impeller remains stationary.
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