2019年7月1日星期一

Diffusion Vacuum Pump Characteristics

For general diffusion vacuum pumps, the vacuum pump body is usually made into a straight cylinder; for large vacuum pumps, there are also conical or convex cavity vacuum pumps. Because the cylinder vacuum pump body is easy to process, it is widely used at present. Vacuum pump body with diameter D < 250mm is made of seamless steel tube; vacuum pump body of large vacuum pump is made of 4 ~ 10mm thick steel plate rolled into cylinder and welded, so the weld seam can not leak. The inner wall of vacuum pump should be polished and nickel plated.

The convex cavity vacuum pump body can greatly increase the pumping speed without increasing the size of the vacuum pump mouth. The convex cavity vacuum pump body is to change the straight cylinder vacuum pump body into a local drum convex cavity vacuum pump body. The processing method is still welded with steel plates. The bottom section of the vacuum pump is the same as the inlet diameter of the flange of the vacuum pump, except that the vacuum pump body enlarges the vacuum pump chamber at the lower part of the inlet flange, and the enlarged diameter extends directly to the wall of the vacuum pump by the jet of the second stage nozzle. Because the convex cavity of the vacuum pump body enlarges the space of pumping action, enlarges the conductivity between the first and second nozzles, and improves the pumping speed.


Ultra-high vacuum pump oil is also a very important issue. The inappropriate surface temperature of the vacuum pump wall makes the oil vapor molecules colliding on the inner surface of the diffusion vacuum pump not easy to condense. The surface temperature of the oil layer flowing down the vacuum pump wall is higher than that of the vacuum pump wall, which is prone to re-evaporation and oil vapor reflux. So the cooling efficiency of the vacuum pump wall should be high. Generally, the spiral copper pipe is welded on the outside of the vacuum pump wall or made into a water jacket (or spiral steel wire is installed in the middle of the water jacket). The cooling part of the vacuum pump is usually confined to the area where the vapor flow can be injected, so that the oil condensated from the top can receive higher heat before returning to the oil pan, so that the gas dissolved in the oil can be released, so as to prevent it from mixing into the oil vapor and entering the nozzles at all levels, thus affecting the vacuum degree of the vacuum pump.

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