In our country, the diffusion pump has been incorporated into the national standard series production, and has been widely used.
Existing diffusion pumps can be classified into different categories:
1. According to working fluid, it can be divided into oil diffusion pump and mercury diffusion pump.
2. According to the structure material, it can be divided into metal diffusion pump and glass diffusion pump. Metal diffusion pumps can be made very large (pumping speed can be hundreds of thousands of litres per second), glass diffusion pumps can only be made into hundreds of litres per second, but its outstanding advantages can not be ignored.
3. According to the type and structure, it can be divided into vertical type, horizontal type, single-stage and multi-stage.
At present, metal or glass vertical four-stage oil diffusion pump is the most widely used. Mercury diffusion pumps have gradually attracted more and more attention.
The main structural components of diffusion pump are pump body, cooling cap, nozzle, steam flow conduit and heater.
The simple working principle of the diffusion pump is to use the high-speed steam flow to establish the partial pressure difference between the pumped container and the diffusion pump, so that the pumped gas molecule is continuously diffused into the high-speed directional steam flow, then compressed into the front space, and finally pumped out by the front pump.
Diffusion pump must work under a certain pre-vacuum (10-2-10-3 torch). After the diffusion pump reaches pre-vacuum, the working fluid in the pump can be heated to boiling by electric furnace. A large amount of steam generated by the diffusion pump can be distributed to the nozzles at all levels through the diversion tube of the pump core. The steam changes direction at the nozzle cap and forms a directional and dense steam flow with high velocity after it is ejected from the nozzle.
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