Combination of vacuum pump units in semiconductor industry

In semiconductor industry, roots vacuum pump and dry pump are used in vacuum unit. On the one hand, it can reduce the size of dry pump, on the other hand, it can obtain larger pumping speed in medium vacuum range.

Because the bearings and synchronous gears of Roots vacuum pump need to be lubricated, the lubricating oil will pollute the vacuum process. The solution is to connect a section of vacuum pipeline on the end cover of the gearbox, and use another auxiliary vacuum pump to pump the pressure in the gearbox lower than the inlet pressure of roots pump, as shown in Fig. 1.

In this way, under this pressure gradient, the oil vapor in the gearbox will not enter the pump cavity through the labyrinth shaft seal and cause pollution. In addition, when roots vacuum pump removes harmful gas, the seal of motor drive shaft must not leak, so shielding motor roots pump appears, which does achieve zero leakage.

Water Ring Vacuum Pump

Dry Scroll Vacuum Pump

industrial vacuum pumps,vacuum furnaces