The equipment used to generate low-pressure
space is called "vacuum pump", which can be generally divided into two types:
the former is used to pump 1 atmospheric pressure of gas to a lower pressure,
and the latter is used to pump the gas with lower pressure to lower pressure.
There are many types of front stage pumps. In terms of vacuum
technology, the performance of the front stage pump is generally required to be:
1. It can pump the gas pressure in a specified container from
atmospheric pressure (760 Torr) to about 10-3 Torr;
2. When the pressure
is about 1 Torr, the pumping rate is comparable to its maximum pumping rate,
that is, it will not fall too much.
Only the rotary vacuum pump can
satisfy the two conditions at the same time. In a broad sense, rotating vacuum
pump is to use mechanical rotor to expand space to obtain low pressure stock.
Generally, it can be divided into rotary vane type, fixed piece type, slide
valve type, centrifugal type and straw shoe type (roots pump). However, in
general laboratories or industrial units requiring high vacuum, the first two
are most commonly used.
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