High frequency discharge in vacuum system is described

Do you know about high frequency discharge in vacuum system? If you don't know much about it, what is the high frequency discharge in vacuum system. High frequency discharge refers to the phenomenon of gas discharge when the frequency of power supply is more than 1 MHz. High frequency discharge can produce stable large volume plasma, so it is the most commonly used discharge form in plasma film-forming and etching technology.

The power frequency of high frequency discharge in vacuum system is usually 13.56 MHz. This is because in order to prevent the interference of high frequency electromagnetic wave radiation energy on communication, the frequency range for industrial use is specified by the international telecommunication authority, including the frequency of 13.56 MHz. However, due to the nonlinear effect of glow discharge, many harmonics of fundamental frequency appear in the discharge circuit, and the high-order frequency waves affecting communication are still emitted from the discharge circuit. The energy of these harmonic radiation in the circuit is much smaller than that of the fundamental frequency wave.

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