At present, the vacuum systems used in various vacuum coating equipment are not only of different structures, but also of different pumping characteristics with different working objects
(1) the main pump of the general vacuum system is the oil diffusion pump. The water-cooled baffle (well) is set above the pump. The front pump of the main pump is a mechanical pump. The working pressure of this system is in the range of 10-2 ~ 10-4Pa
(2) in the ultra-high vacuum system, the vacuum degree of the coating chamber can be increased to more than 10-6pa by adding liquid nitrogen cold trap or titanium pump to the above vacuum system, so the ultra-high vacuum system can be obtained. Because the system still uses oil diffusion pump, there is still oil system.
The cwd-500 is equipped with three pole type: cold cathode sputtering ion pump (jlp-400 type) as the main pump, titanium sublimation pump (st-0.1 type) as the auxiliary pump, and sp-40 molecular sieve adsorption pump as the coarse pumping pump. The system is also equipped with CT-200 built-in plug-in valve, a complete set of front stage vacuum pipeline, baking device, etc. in order to make it easy to exhaust or quickly extract air during baking, the unit can also use a set of mechanical pump and adsorption device as auxiliary front stage pump. The ultimate vacuum of the unit can reach 6.7 × 10-8 PA, and it can be pumped to 1 × 10-5 PA from atmospheric pressure within 1h
A very clean vacuum can be obtained by using the molecular pump system of the coating machine, which is conducive to the improvement of the film quality. The pumping speed of molecular pump is very high, which can shorten the process period. For example, 1200L · S-1 molecular pump is used in the ordinary high vacuum coating machine with a diameter of 500mm. It takes only 18min to pump 3 × 10-4Pa from the atmosphere. It can be seen that the effect is remarkable
(3) the vacuum coating equipment of the cryopump system using the cryopump system has a series of advantages: no selective gas, no hydrocarbon pollution, large pumping rate, low limit pressure, simple operation and convenient operation and maintenance
2BE Vacuum Pump Maintenance
Dry Type Oilless Vacuum Pumps
Liquid Ring Vacuum compressor
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