The function of the vacuum pump is to remove gas molecules from the vacuum chamber, reduce the pressure of the vacuum chamber gas, so as to achieve the desired vacuum. Generally speaking, there is a wide range from the atmosphere to very high vacuum, and so far no vacuum system can cover this region. Therefore, in order to achieve different product process indicators, work efficiency and equipment life requirements, different vacuum section needs to choose different vacuum system configuration. To achieve optimal configuration, the following points should be considered when choosing a vacuum system.
1. determine the scope of work vacuum.
First, you must check to determine the vacuum degree of each process requirement. Because each process has its own vacuum range, it must be carefully studied and determined.
2. determine the vacuum limit.
On the basis of determining the vacuum degree required by the process, the limit vacuum degree of the vacuum pump system is checked, because the limit vacuum degree of the system determines the best working vacuum degree of the system. Generally speaking, the limit vacuum of the system is 20% lower than the working vacuum of the system and 50% lower than the limit vacuum of the front pump.
3. Selection calculation of main vacuum pump
S = 2.303v/tlog (P1/P2), where: s for the vacuum pump suction rate, V for the vacuum chamber volume, t to achieve the required vacuum time, P1 for the initial vacuum, P2 for the vacuum requirements.
4. vacuum volume
Check the time required to achieve the required vacuum and flow resistance and vacuum tube leakage. Considering the requirement of vacuum degree, it is necessary to maintain vacuum rate under certain technological conditions.
5. types of pumping gas and gas extraction
Check and determine the suction and exhaust types of the process requirements. If the pump gas reacts with the liquid of the vacuum pump, it will pollute the pump system. At the same time, we must consider in the pumping process to determine the appropriate exhaust time and the amount of gas generated, how to choose the vacuum pump system.
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