The main advantages of vacuum pump oil are small clearance, less leakage, high compression ratio, stable pumping speed in a wide range of crude force and wide working pressure range; as the volume of the compression chamber changes continuously, the driving torque change is small, the power change is small, the vibration noise is low, and the reliability is high. This is not available for other types of dry vacuum pumps.
The problems of oil leakage, noise, oil return pollution, high energy consumption and vibration of ordinary vane oil pump have adverse effects on users, such as oil vapor pollution in biological products industry and semiconductor industry and oil return valve problem in process system. In the coating process of vacuum coating equipment, if the ordinary oil-free vertical vacuum unit is used as the vacuum pump oil in the front stage when coating under 20 ~ 40Pa vacuum condition, the coating process equipment will be polluted and the film forming quantity will be affected.
There is a gap of 509l between using oil pump and using dry pump in semiconductor chip manufacturing process, and the discharged oil mist vapor also pollutes the environment. In particular, the use of oil pump test instruments will cause adverse effects in the industry. The vortex oil-free vacuum pump used in large synchrotron radiation beam line as the front stage vacuum pump is also quite obvious. In addition, the oil-free vertical vacuum unit eliminates the environmental pollution and trouble caused by the oil leakage of ordinary oil pump.
Water Ring Vacuum Pump
Dry Scroll Vacuum Pump
industrial vacuum pumps,vacuum furnaces
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