Rotary vane vacuum pump in microelectronics industry

Rotary vane vacuum pump has been successfully applied in the microelectronics industry. Rotary vane vacuum pumps are mostly small and medium vacuum pumps. Rotary vane vacuum pump has two kinds of single stage rotary vane vacuum pump and two stage vacuum pump. The so-called double stage rotary vane vacuum pump is to connect two single stage pumps in series. It is usually made in two stages to achieve higher vacuum.

Microelectronic technology requires that the size of electronic components and circuits become smaller and smaller, and the requirement of integration is higher and higher. This is closely related to the application of vacuum technology, especially the micro-fabrication technology of VLSI. The formation of its geometric structure, the growth technology of ultra-thin layer and the particle beam injection technology all need a high-quality and clean vacuum environment, which shows the dependence of its development on vacuum technology and equipment. At present, vacuum processing is required in the operation of VLSI.

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