Since the vacuum pump has selective pumping, sometimes a pump cannot meet the pumping requirements, and several pumps need to be combined to complement each other to meet the pumping requirements. For example, a titanium sublimation pump has a high pumping speed for hydrogen, but it cannot be pumped, and a three-pole sputter ion pump (or a two-pole asymmetric cathode sputtering ion pump) has a certain pumping speed for argon. When combined, the vacuum device will have a better vacuum.vacuum-pump-type
In addition, some vacuum pumps can't work under atmospheric pressure, and need pre-vacuum; some vacuum pump outlet pressure is lower than atmospheric pressure, and the foreline pump is needed, so it is necessary to combine the pumps.jet-vacuum-pump-in-chemical-industry
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