Material selection principle of vacuum material in vacuum pump

① The vacuum pump has enough mechanical strength and rigidity to ensure that the shell can withstand the atmospheric pressure under the room temperature and baking temperature, and does not deform when heating and baking (especially for ultra-high vacuum system).

② Good air tightness. To maintain a good vacuum environment, the wall material should not have porous structure, cracks or other defects that cause leakage. There are lower permeability rate and outgassing rate.

③ The saturated vapor pressure at the operating and baking temperatures should be low enough (especially for ultra-high vacuum systems).

④ Good chemical stability. It is not easy to oxidize and corrode, and does not react with the working medium in the vacuum pump and the outgassing in the process.

⑤ Good thermal stability. Keep good vacuum and mechanical properties within the working temperature (high and low temperature) of the system.

⑥ Under the working vacuum degree and working temperature, the internal components of the vacuum vessel shall maintain good working performance to meet the requirements of the working process.

⑦ It has good ductility, machinability and weldability, and is easy to process into complex shell.

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