Technical Parameters Of Molecular Pump

Molecular pumps cover almost all possible applications, with a unique electromechanical design, high front-end pressure resistance, suitable for 10-10-10 MB vacuum environment.

The advantages of molecular pumps are:
1. no oil vapor pollution, can get a clean high vacuum.
2. start fast, activate fast.
3. Turbomolecular pumps are mostly small space, installation direction is not restricted (except oil-lubricated bearings), can be used in the installation of restricted locations.
4. gas transport capacity is strong, suitable for high gas loading process, such as sputtering, etching and so on.
5. The inlet pressure range can be operated between 10x-1 and 10x-3 Torr. In this pressure range, the ion pump can not be used. For cryogenic pumps, throttling pumping speed or frequent regeneration are required, and the work of the diffusion pump will become unstable.

Disadvantages of molecular pumps:
1. high price
2. sensitive to particulate matter or sediment.
3. some pumps are resistant to atmospheric impact, and the blades will be damaged due to bending and bending.