Oil Diffusion Pump Operation

Oil diffusion pump is a vacuum pump using low pressure, high speed and directional flow of oil vapor jet. The limit vacuum of this pump is 10-4-10-5 Pa, the working pressure range is 10-1-10-4 Pa, the pumping speed range is several hundred thousand liters/sec (1 liter = 10-3 m 3). Oil diffusion pump is the main equipment to obtain high vacuum. It is widely used in vacuum smelting, vacuum coating, space simulation test and some vacuum systems insensitive to oil pollution.

Operation procedure of oil diffusion pump:

The operation of the oil diffusion pump includes two operations: opening the pump and stopping the pump.

The pump opening sequence of oil diffusion pump:

1. Turn on the cooling water of the diffusion pump, pre-vacuum with the mechanical pump, after the pressure of the diffusion pump is lower than 10-1Pa, turn on the power supply of the diffusion pump to heat the electric furnace and heat the diffusion pump.

2. For small pumps below K-400, the pump can work normally after 45 minutes of heating, and for large pumps between K-500 and K-1200, it needs 45-65 minutes of heating before it can work normally. Therefore, when using the diffusion pump vacuum system, we should pay attention to arranging the start-up time of the diffusion pump.

3. open the diffusion pump population valve, the pump can work normally.