The common vacuum gauges in semiconductor industry include resistance vacuum gauge (Pirani vacuum gauge), thermocouple vacuum gauge, capacitance vacuum gauge, electric ion vacuum gauge, cold cathode ionization vacuum gauge and full range vacuum gauge. The cold cathode ionization vacuum gauge can be divided into penning gauge, magnetron gauge and anti magnetron gauge.
Full range vacuum gauge is a combination of low vacuum gauge and high vacuum gauge; resistance vacuum gauge has wide measuring range and is commonly used; thermoelectric vacuum gauge has narrow vacuum measuring range and simple structure, which is not easy to be damaged; the measurement value of capacitance vacuum gauge is not affected by gas variety; ionization vacuum gauge belongs to high vacuum gauge and will generate heat; cold cathode ionization vacuum gauge belongs to high vacuum gauge, which is not hot and easy to repair; Full range vacuum gauge active range switching, easy to use.
Most of today's vacuum gauge probes and signal processing circuits work together, which enables anti-interference ability and promotes its miniaturization. Most probes use metal material instead of glass material, which is more robust and delicate. The vacuum gauge display controller also requires miniaturization. Some of them have a volume of 105mmx110mmx250mm and a mass of 1.3KG, with three connectors. Each connector can be connected with a resistance vacuum gauge or a cold cathode ionization vacuum gauge. This intelligent vacuum meter controller is easy to carry and use.
CL Sereis Cone Liquid Ring Vacuum Pump
Roots Blowers
Roots Vacuum Pump
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