How to maintain the return oil of diffusion vacuum pump

What about the oil return from diffusion pump? If the vacuum gauge is not damaged, the oil return is generally not needed to be repaired. The main purpose is to clean the oil of diffusion pump in vacuum chamber. It's better to use gasoline to wipe the vacuum chamber wall all over again, and then wipe it with alcohol again. Oil must be clean is the most important, if there is oil in the room, there will be white film plating, film quality is very poor and other phenomena, not because of the damage of electroplating equipment, but because of oil in the vacuum chamber. 

1. The cooling water is blocked or the water pressure is not enough, which leads to the decrease of cooling capacity, the upper part of diffusion pump becomes hot, and the oil vapor cannot be liquefied well. The solution is to connect the inlet pipe of diffusion pump with 4MPa air source to blow out the scale, and connect the outlet pipe with 4MPa air source. If the scale is large and firm, dilute hydrochloric acid can be added. Or replace the diffusion pump.

2. The heating temperature is too high, because the power of the diffusion pump heater is not consistent with the rated power, too high, resulting in a large amount of steam, which can cause oil return. The problem can be solved by replacing the electric furnace wire.

3. If the oil filling quantity is too high, the steam circulation will be slow and the steam will be trapped when it is compressed to the lower level, which will cause oil return. The control of oil filling amount according to the information provided by the manufacturer can be avoided.

4. Oil oxidation, diffusion pump oil oxidation, viscosity and steam flow are affected, can not reach the injection speed, naturally returned to the vacuum chamber. It can be said that the diffusion pump is removed, the pump core is taken out, cleaned with 120 ° gasoline, then polished, the carbon deposit and black oxide layer are polished off, then cleaned and dried with 120 ° gasoline again, and then installed, the diffusion pump oil or silicone oil is poured in, and the work can be started after heating several times. Prevent contamination of workpiece.

5. If the working time of diffusion pump is more than 8-10 years, or in harsh environment, replacement can be considered. Improve work efficiency and maintenance cost.

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