What kinds of vacuum pumps are there in the vacuum system?
Vacuum system
is composed of vacuum chamber, vacuum pump or vacuum unit, vacuum pipeline,
vacuum valve, trap and other vacuum components, electrical control system, etc.
it is widely used in electronic semiconductor industry, photoelectric backlight
module, mechanical processing and other industries. Vacuum system is often
composed of several vacuum pumps, which play a role in different fields
according to their characteristics.
1. Main pump
The main pump
is used to obtain the required vacuum degree to meet the specific process
requirements of the vacuum pump. According to the different limit pressure
required by the vacuum system, the limit pressure of the main pump in the
selection process is generally half to an order of magnitude lower than the
limit pressure required by the system.
2. Crude pump
Crude
pumping pump is a vacuum pump that starts pumping at atmospheric pressure and
reduces the pressure of the pumped system to that of the main pump system.
The pressure reached by the crude pump must be less than the starting
working pressure of the main pump. The crude pump can also be used as a
pre-stage pump.
3. Front pump
The former stage pump is a vacuum
pump which maintains the pressure of the former stage of a pump lower than the
critical pressure of the former stage. The pre pump can also be used as a crude
pump, but it must meet the requirements of pre pumping time and vacuum degree.
At the same time, the pre vacuum condition required for the operation of
the main pump shall be met by the pre stage pump; under the maximum allowable
exhaust pressure of the main pump, the pre stage pump must discharge the maximum
amount of gas discharged by the main pump in time, and the pumping speed of the
pre stage pump shall be in accordance with the actual pumping speed of the pump
at the actual inlet pressure.
4. Maintenance pump
Maintenance
pump means that when the air volume in the vacuum system is very small, it can
not effectively use the previous pump. Therefore, an auxiliary pump with a
smaller pumping speed is equipped in the vacuum system to maintain the normal
operation of the main pump or the low pressure vacuum pump required by the
evacuated system.
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