Pressure parameter can be seen everywhere in vacuum system, which refers to the vertical force of gas on the surface of solid or liquid, and it is synonymous with pressure in vacuum system.
The most common pressure parameter is naturally the ultimate pressure. Limit pressure is one of the main parameters of vacuum pump performance in vacuum system. It is generally understood that in the process of vacuum system pumping, after a long time of pumping, when the pumping speed of vacuum pump or vacuum unit is 0 or the pressure parameter of vacuum chamber is maintained at a certain value all the time, that is the limit pressure of vacuum pump or vacuum unit.
Secondly, work pressure. Working pressure is the pressure parameter which is necessary to ensure the process implementation and product quality in the production process of an enterprise. In the process of vacuum equipment selection, in order to meet the process requirements, the limit pressure of the equipment will be lower than the working pressure by an order of magnitude.
Foundation pressure. In some process fields or technical personnel's mouth, the basic pressure is also called background pressure, which refers to the pressure of the vacuum chamber at the beginning of the production process. For example, for magnetron sputtering applications, it may be necessary to pump the local pressure to 10-4Pa, while the working pressure during sputtering may be about 1pA.
Residual pressure. In some cases, the residual pressure is actually the same as the ultimate pressure, which refers to the total pressure of the residual gas in the vacuum chamber after a period of pumping operation of the vacuum pump or vacuum unit. If the vacuum system has no pumping speed at this time, the residual pressure is the limit pressure of vacuum pump or vacuum unit.
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