oil diffusion pump working principle and structure

The working principle of the oil diffusion pump is similar to that of the steam jet pump. The high-speed steam jet carries the gas to achieve the purpose of pumping, so it has similar characteristics as the water jet pump. The difference is that the diffusion pump works in a high vacuum area, and its working pressure ranges from 10-2 to 10-6 pa. Widely used in industrial sectors such as electronics, chemicals, metallurgy, machinery, petroleum and atomic energy.

When the oil vapor is ejected from the umbrella nozzle (such as the class I nozzle) at supersonic speed, the speed gradually increases, the pressure and density gradually decrease, and the pumped gas A on the jet diffuses into the steam jet due to the density difference. And is carried by the jet to the water-cooled pump wall B. At B, most of the working steam is condensed into oil droplets flowing back to the oil pan along the pump wall for recycling, and the pumped gas is accumulated and compressed at B, and finally The lower jet is carried away to achieve progressive compression and is finally pumped away by the foreline pump.

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