Application Field of Vacuum Pump Unit

The scroll pump of vacuum pump unit has been widely used in many fields: 1. Semiconductor industry: thin film manufacturing equipment, semiconductor device packaging equipment;


(2) Scientific instrument industry: synchrotron radiation beam machine, electron microscope, Aurora test equipment of vacuum pump unit, analysis and test instrument;

(3) Machinery and equipment industry: material preparation equipment, vacuum detection equipment, vacuum filtration equipment, material purification equipment, ultra-high vacuum exhaust equipment;

(4) Medical equipment industry: dental equipment, dialysis machine; Biological products industry: material purification and drug preparation;

(5)Packaging industry: food, medicine, biological products and other packaging equipment;

(6)Vacuum metallurgy industry: vacuum furnace, nano-material preparation equipment, vacuum detection equipment and other fields. The scroll pump as the front pump of the molecular pump and the small cryopump is the best configuration to obtain the oil-free vacuum system. Its main moving parts have only one moving scroll disc, so the power transmission is simple. Under the same size, the moving radius is small, the parts are few, the structure is simple and compact, the size of the whole machine is small, the clearance between the dynamic and static scroll discs, between the moving disc and the pump chamber is small, and there is no friction between the moving parts in the pump and the pump chamber, so there is almost no wear, stable operation, low power consumption, small gas flow loss, and the work can be done. High reliability, long life, easy maintenance, low maintenance cost, high volume efficiency. Air cooling without water cooling.

The scroll vacuum pump has a high compression ratio and a stable pumping speed in a wide pressure range. Because the volume change of the compression chamber is continuous, the driving torque change is small, the power change is small, and the vibration noise is low, which is not available for other types of dry vacuum pumps. In order to realize the effective work of the scroll pump, it is necessary to make the scroll profile mesh well in each vacuum chamber to avoid the worsening of the force on the scroll wall, thermal deformation, high-pressure gas retention in the exhaust chamber and the reduction of the efficiency of the vacuum pump caused by the large pressure difference of the vacuum chamber and other factors. Therefore, the accurate inclusion and meshing between the scroll profiles should be ensured, and the leakage of working medium should be controlled to achieve the purpose of pumping. This is an important basis for the design of scroll pump structure.

In the pumping passage of the pump, there is no need to use any oil and sealed liquid as the medium. Relying on the relative rotation of the dynamic and static scroll discs, the suction chamber and the compression chamber will be exhausted to continuously complete the suction, compression and exhaust process. Therefore, how to prevent leakage to solve the sealing problem is particularly important. The seal of the scroll pump mainly includes the radial seal of the axial meshing clearance and the tangential seal of the radial meshing clearance, namely the tooth side seal.

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